摘要
为了在牺牲层工艺中保护金属电极不被腐蚀,提出了一种利用铝层保护金属电极的方法。在试验中采用了两种铝保护层厚度300 nm和1μm,在两种腐蚀液体4NH4F∶1HF∶2甘油和1HAC∶1NH4F中进行了试验,通过试验表明,铝金属层在两种腐蚀液体中都能够有效保护金属电极,延长牺牲层的腐蚀时间。最后,通过SOI微加速度计加工工艺进一步验证了该方法的有效性。
In order to protect the metal electrode in sacrificial etching process, a method of using is aluminum layer to protect metal electrode is proposed. Two thick aluminum layers （one is 300 nm, the others is 1 μm）to protect metal electrode were studied in two etchants, one is 4NH4F ： 1HF ：2 glycerol and the other is 1HAC ：INH4F. Through the experiment, the metal pad can be kept in good condition after a long etching time through the protection of aluminum layer. Finally, this method is tested effective through SOI accelerometer fabrication.
出处
《电子器件》
CAS
北大核心
2017年第1期1-5,共5页
Chinese Journal of Electron Devices
基金
The Laboratory of Precision Manufacturing Technology of CAEP under Grant(ZZ14007,ZZ16003)
作者简介
张照云（1984-），男，四川南充人，工程师，主要研究方向为微惯性器件设计、加工技术研究。
