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用于大孔径凸非球面检测的部分补偿透镜的优化设计 被引量:3

Optimization design of partially compensating lens for large aperture convex aspheric surface testing
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摘要 针对部分补偿法和子孔径拼接技术对大孔径凸非球面进行测量时,部分补偿透镜的优化设计是关键技术之一,基于ZEMAX软件对用于大孔径凸非球面的部分补偿透镜进行了优化设计,以波前斜率作为优化目标,通过直接观察弥散圆半径对全口径的光线进行优化。设计结果表明,用结构简单的单片部分补偿透镜即可实现对大孔径凸非球面的面形测量,在不同的子孔径区域,部分补偿系统在理想焦面处的弥散圆最大半径均小于165μm,满足设计要求,验证了结合部分补偿法和子孔径拼接技术测量大孔径凸非球面的可行性。 Optimization design of partially compensating lens is one of the key problems for large aperture convex aspheric surface testing using part-compensating lens and sub-aperture stitching. A design method for the part-compensating lens based on ZEMAX was proposed, which took the slope of wave-front as the optimization objective, and optimized the lights on the full aperture by observing the radius of dispersive spot. The results indicate that, the large aperture convex aspheric surface can he tested by a simple single part-compensating lens. In different areas of the sub aperture, the maximum radius of the dispersive spot in the ideal focal plane is less than 165 μm, which can always achieve the requirement, verifing the feasibility of tes- ting the large aperture convex aspheric surface by part-compensating lens and sub-aperture stitching.
作者 孟晓辰 祝连庆 Meng Xiaochen Zhu Lianqing(Beijing Key Laboratory of Optoelectronic Instrument Technology, Beijing Information Science and Technology University, Beijing 100101, China)
出处 《应用光学》 CAS CSCD 北大核心 2016年第5期747-751,共5页 Journal of Applied Optics
基金 教育部"长江学者与创新团队"发展计划(IRT1212) 北京市教委科研计划项目(KM201511232006)
关键词 光学设计 部分补偿透镜 大孔径凸非球面 弥散圆 optical design part-compensating lens large aperture convex aspheric surface dispersive spot
作者简介 孟晓辰(1985-),女,山西忻州人,博士,主要从事光学精密测量方面的研究。E-mail:mengxc@bistu.edu.cn
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