摘要
介绍了金刚石飞切微槽形状精度理论分析及衡量方法,进行了金刚石飞切单晶硅片的加工实验,并且利用VHX-2000超景深显微镜检测了单晶硅微槽的形状精度。并对实验数据进行处理,得到了进给量、主轴转速、切削深度等主要加工参数对微槽加工的形状精度的影响规律。
This paper introduces the diamond fly cutting micro groove shape accuracy theory analysis and measure method, diamond fly cutting of monocrystalline silicon wafer processing experiment, and use VHX - 2000 super depth of field microscopy was used to detect the shape precision of single crystal silicon mi- cro groove. And the experimental data were processed, and the influence of the main processing param- eters such as feed rate, spindle speed and cutting depth on the shape accuracy of micro groove machi- ning was obtained.
出处
《制造技术与机床》
北大核心
2016年第6期111-113,共3页
Manufacturing Technology & Machine Tool
作者简介
董延军，男，1981年生，讲师，主要从事机械加工教学及研究。
