摘要
提出一种用于激光(工作波长为1 064nm)防护的非逆反射双层闪耀光栅。以光栅方程、闪耀波长和闪耀角关系公式为基础,研究了双层闪耀光栅光线分布特性,分析了上下微结构闪耀角度关系;设计了双层闪耀光栅各特性参数,其上、下层光栅闪耀角分别为50°和6°,周期均为5.2μm,光学元件厚为0.5mm,在下表面镀Ag反射膜。采用反应离子刻蚀(RIE)技术制作双层闪耀光栅,通过轮廓仪进行测试。研究结果表明,双层闪耀光栅的光学特性受微结构形状误差影响较大,当光线垂直照射双层闪耀光栅时,出射光与入射光形成20°夹角,实现了激光非逆反射的目的。
A novel non-backward reflective double-layer blazed grating,which is used for laser（1064nm）protection,is proposed.Based on the universal equation of the grating and the relationship between blazed wavelength and blazed angle,the light distribution characteristics of the double-layer blazed grating are studied.This paper analyzes the blazed angle′s relationship between the upper and lower micro-structures,and the characteristic parameters of the double-layer blazed grating are designed.The upper and lower grating blazed angels are 50°and 6°,respectively,its period is 5.2μm and the thickness of the optical element is 0.5mm.The lower surface was coated with a silver reflective film.A double-layer blazed grating was fabricated by reactive ion etching（RIE）technique and the test was carried out by using the profile.It is shown that the optical properties of the double-layer blazed grating are seriously by the form error of the micro-structure.As the light is vertical to the double-layer blazed grating,the angle between the incident laser and the exit laser is 20°.It can achieve the laser reverse reflection.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2016年第3期259-263,共5页
Journal of Optoelectronics·Laser
基金
国家自然科学基金(11474037)资助项目
作者简介
吴博琦（1988-）．女．吉林长春人．博士研究生，主要从事光学微结构的研究工作．
E-mail：custdong@163．com
