摘要
采用基于电磁补偿原理的精密天平,研制了一种微纳力值标准装置。通过高等级的标准砝码对天平进行校准,实现标准装置力值的SI溯源,在500 n N^500μN范围的力值测量标准不确定度小于0.7%。该装置用于对原子力显微镜(AFM)微悬臂弹性常数和微小力值传感器的力值提供准确的溯源。采用多自由度位置调整系统调整被测微悬臂或传感器的位置及俯仰角度,提高了定位准确度。对几种不同弹性常数的AFM微悬臂进行测量,测量结果的标准偏差小于1.6%,满足高准确度微小力值测量的要求。
A micro-nano Newton force standard based on an electromagnetic compensation balance was developed.The standard weights with high grades are used to calibrate the balance. As a result,the realized force of the micronano Newton force standard is traced to the International System of Units（SI）. The standard uncertainty of force mea-surement in the range of 500 n N-500 μN is better than 0.7%. The force standard is applied to accurate traceabilityfor spring constant of cantilevers in Atomic Force Microscope（AFM）and force of small force transducers. The posi-tion and pitch angel of the cantilevers or transducers to be calibrated are adjusted by a positioning adjustment sys-tem with multi-degree of freedom to improve the accuracy of positioning. Several AFM cantilevers with differentspring constants were calibrated using this standard. The standard deviations of the measurement results are betterthan 1.6%,meet the requirements for high accuracy small force measurement.
出处
《传感技术学报》
CAS
CSCD
北大核心
2015年第12期1779-1784,共6页
Chinese Journal of Sensors and Actuators
基金
国家科技支撑计划项目(2011BAK15B06)
关键词
力值计量
微纳力值标准装置
电磁补偿天平
纳米微动台
微悬臂
力传感器
force metrology
micro-nano Newton force standard
electromagnetic compensation balance
nano-positioning stage
cantilevers
force transducers
作者简介
胡刚（1972-），男，硕士，副研究员，1995年毕业于北京轻工业学院（现北京工商大学）自动控制系，获工学学士学位，2004年获中国计量科学研究院工学硕士学位（测试计量技术及仪器方向）。1995年进入中国计量科学研究院，长期从事力值计量研究工作。主要研究方向为力值基标准、动态及静态力值溯源方法、微小力值计量等，先后发表论文20余篇，hugang@nim．ac．cn。
