摘要
采用磁控溅射法和脱合金法相结合的方法制备了纳米多孔铜钛合金。以原子比为40∶60的Cu-Ti合金靶材为原料用磁控溅射方法制备了厚度为720 nm的铜钛合金薄膜(Cu_(35)Ti_(65)),并将此薄膜置于0.13 mol/L的氢氟酸溶液中用脱合金方法腐蚀得到了纳米多孔铜钛合金薄膜,将制备好的铜钛合金薄膜作为三电极测试系统中的负极材料,以对其电容性能进行测试。本文测试和计算了这种纳米多孔铜钛薄膜电极在1 mol/L Na_2SO_4电解液中的比电容。结果表明,电极在这种中性溶液中的电化学性能良好,比容量为8.96 mF·cm^(-2),比现有的纳米多孔铜电极有很大的提高。对NPCu/Ti电极的循环充放电性能的测试结果表明,该电极具有优良的循环稳定性能,比现有的纳米多孔铜电极有明显的改善。这种改善与电极材料的多孔结构有关。
Thin film of nanoporous Cu-Ti alloy as a promising electrode material for electrochemical capacitors was prepared by a two-step process, i.e. a thin film of Cu_（35）Ti_（65） was firstly deposited on silicon substrate by magnetron sputtering process with Cu_（40）Ti_（60） alloy as target, and then the sputtered film of Cu_（35）Ti_（65） alloy was dealloyed in 0.13 mol/L HF solution for 12 h to prepair the isolated thin film of nanoporous Cu-Ti alloy. Electrodes made of the nanoporous Cu-Ti alloy exhibited excellent electrochemical capacitance performance with a specific capacitance of 8.96 m F·cm^（-2）in 1 mol/L Na_2SO_4 solution. Furthermore, the nanoporous Cu-Ti alloy electrode showed remarkable chemical stability by cyclically charging and discharging. The excellent electrochemical performance of the nanoporous Cu-Ti alloy can be ascribed to the high specific surface area of the nanoporous structure.
出处
《材料研究学报》
EI
CAS
CSCD
北大核心
2015年第12期913-920,共8页
Chinese Journal of Materials Research
基金
上海市教委创新项目14YZ082
上海市科委自然科学基金14ZR1428100资助项目~~
关键词
金属材料
纳米多孔铜钛
磁控溅射
脱合金
电化学容量
超级电容器
metal materials
nanoporous Cu-Ti
magnetron sputtering
dealloying
electrochemical capacitance
electrochemical capacitor
作者简介
本文联系人：潘登．教授
