摘要
脉冲激光沉积技术是制备先进光学薄膜与纳米光学器件的重要手段和前沿领域,是国际研究的热点。介绍了脉冲激光沉积技术原理与特点、制备功能薄膜的研究现状和发展动向,着重阐述了双激光沉积制备功能薄膜的研究现状与未来发展;同时基于更高的需求,针对脉冲激光沉积技术的特点,设计构建了结合动能粒子磁过滤技术的激光沉积系统,提出了融合原子层沉积技术的发展思想,为提高激光沉积功能薄膜性能提供了硬件支撑和技术指导。
Pulsed laser deposition technology, which is considered to be one of the best method for preparing function films, has the large development potential and broad application. It′s indicated that： mostly all the films could be prepared by pulsed laser deposition technology; most of pulsed laser depositions are carried out by excimer laser with the wavelength of 248 nm whose photon energy is high, and most of films are prepared by single laser in the gas and heater condition; the films prepared by pulsed laser deposition are amorphous or polycrystalline, and a few of single crystal films are prepared just in the condition of very high temperature and vacuum. On the base of the characteristics of this technology, the pulsed laser deposition system with magnetic filter technology is designed and founded to supply the technology and hardware base for improving the performances of function films prepared by pulsed laser deposition.
出处
《激光与光电子学进展》
CSCD
北大核心
2015年第12期9-18,共10页
Laser & Optoelectronics Progress
关键词
激光技术
脉冲激光沉积
功能薄膜
超短脉冲激光
双激光
磁过滤技术
laser technique
pulsed laser deposition
function films
ultra-short pulse
double laser beams
magnetic filter technology
作者简介
程勇（196l-），男，博士，教授，主要从事全固态激光器与激光沉积功能薄膜等方面的研究。Email：gdyjs@263．net；luyimin_zy@163．com
