摘要
依据光学薄膜理论,建立膜系优化评价函数,利用软件优化膜系,实现0°～75°入射宽光谱P光分光膜的设计.选择H4和MgF2作为高低折射率材料,采用电子束及离子辅助沉积技术,来制备该分光膜.通过对膜层厚度误差分析,用晶控片单独控制相对敏感度较高的膜层,解决了薄膜制备过程中不能精确控制膜厚误差的问题.运用逆向分析法对实验测试结果进行模拟分析,通过改变膜厚修正因子,使P光透射光谱曲线更加平滑.光谱测试表明P光垂直入射平均透过率为60.3%,满足系统使用要求.
Based on the optical film theory, the membrane system was introduced to optimize the evaluation function, and the TFC software was used to optimize the membrane system, so that a 0%to 75% wide spectrum of P-polarized light beam splitter was designed. In order to produce the beam splitter, H4 and MgF2 were chosen as high/low refractive index materials, and the electron beam and ion assisted deposition techniques were adopted. During the experiment, the film thickness error was analyzed and a crystal was used to control the highly sensitive layers, which solved the accuracy problem in the film preparation process. Utilizing the inverse analysis method to simulate the experimental results, the Ppolarized light transmission spectrum curves become smoother by changing the thickness of the correction factor. The spectral testing shows that the average transmittance of the prepared beam filter is 60.3 with vertical incidence P-polarized light, whieh meets the requirements of the system.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2015年第3期7-11,共5页
Acta Photonica Sinica
基金
省部产学研结合项目(No.2010A090200006)资助
关键词
薄膜
分光膜
逆向分析法
评价函数
相对敏感度
修正因子
电子束沉积
离子辅助沉积
Thin fihns
Beam splitter
Reverse analysis
Evaluation function
Relative sensitivity
Correction factor
Electron beam deposition
Ion assisted deposition
作者简介
付秀华（1963-），女，教授，博士，主要研究方向为光学薄膜．Email：goptics@126．com
通讯作者：张于帅（1987-），男，硕士研究生，主要研究方向为光学薄膜．Email：yushuai100929@163．com
