摘要
环境温度的变化会造成硅微加速度计检测电路输出漂移,从而使加速度计敏感质量的闭环点位置产生漂移。通过分析闭环点位置对加速度计标度因素K1和零偏K0的影响,证明了闭环点位置漂移是造成零偏K0温漂的主要因素和标度因素K1温漂的次要因素。提出了加速度计闭环点位置控制方法,通过在环内加入控制电压可使闭环点始终工作于稳定位置。试验结果证明,该方法可显著降低零偏K0的温漂,闭环点始终位于零反馈位置时零偏K0的温漂系数可降低一个数量级,且温漂滞环可被压缩至±1 mV(±7.77 mg)以内。
The output of accelerometer detection circuit is affected by the change of ambient temperature, so the proof-mass may deviate from the original close-loop position. In this paper, the impacts of the deviation on the scale factor and bias are analyzed. The results show that the close-loop position drift is the main factor for causing the thermal drift of bias K0, and is the secondary factor for causing the thermal drift of scale factor K1. A method based on close-loop position control is proposed. The close-loop position is stabilized in a fixed position by adding control voltage to inner loop. The test results indicate that the thermal drift of the bias is dramatically reduced by means of the close-loop position control. The thermal drift coefficient of the bias in zero-feedback position is decreased by an order of magnitude. The hysteresis is depressed to ± 1 mV（ ± 7.77 mg）.
出处
《中国惯性技术学报》
EI
CSCD
北大核心
2014年第1期114-119,共6页
Journal of Chinese Inertial Technology
基金
总装"十二五"预研项目(513090203**)
关键词
硅微梳齿式加速度计
温漂
闭环点位置
滞环
comb-finger micromechanical silicon accelerometer
thermal drift
close-loop position
hysteresis
作者简介
徐哲（1981-）,男,博士生,从事MEMS惯性仪表研究.E-mail：xu-z10@mails.tsinghua.edu.cn
联系人：董景新（1948-），男，教授，博士生导师。E-mail：dongjx@mail．tsinghua．edu．cn
