摘要
利用金属蒸汽真空弧 (MEVVA)源所产生的强束流离子注入铝研究了相变、增强扩散和钇铝合金的形成条件 .X射线衍射分析表明注入层有Al3 Y和Al2 O3 出现 .从背散射分析可以发现 ,Y原子有着明显的增强扩散和外扩散效应 ,Y离子的深度分布已达 62 0nm ,远大于LSS理论的预计值 .注入层钇铝原子比可达到 17%～ 2 4 %.连续铝合金层已经形成 .
Phase transition, enhanced diffusion and Y-Al alloy formation are studied using Y implantation with high current extracted from metal vapor vacuum arc (MEVVA) ion source. The results of X-ray diffraction analysis show that Al 3Y and Al 2O 3 are formed during Y ion implantation. Backscattering analysis shows that Y atom enhanced-diffusion and outdiffusion are appeared obviously. The implantation depth reaches 620 nm, it is much greater than calculated value by TRIM program. Y/Al ratio reaches 17%～24%. A continuous Al alloy layer has formed.
出处
《北京师范大学学报（自然科学版）》
CAS
CSCD
北大核心
2001年第5期615-618,共4页
Journal of Beijing Normal University(Natural Science)
基金
国家自然科学基金资助项目 ( 5 96710 5 1)
国家"八六三"计划资助项目
关键词
钇离子注入
铝
深度分布
增强扩散
钇-铝合金
Y ion implantation
aluminum
formation of Y-Al alloy
depth distribu-tion
enhanced diffusion
