摘要
冲击式微位移机构是利用压电陶瓷的冲击力使目标产生步进式微位移的一种微动机构 ,其特点是最小位移可达几纳米 ,具有实用的运动速度 ,运动范围不受限制 ,而且步距可从几纳米到几微米连续可调 ,使其可能在微米 /纳米技术中得到广泛应用 .本文提出一种由一对压电陶瓷驱动的新型冲击式微位移机构 ,介绍了该机构的工作原理 。
The impact drive mechanism (IDM) utilizes impulsive force generated by piezo to drive object for micro and nano step movement,which has the advantages of applicable speed,unlimited motion range,and continuously controlled step size from several nanometers up to several microns.All these properties of IDM are promised a broad application in the micro and nano technology.In this article,a balanced IDM combined by a couple of convential IDMs was developed.We discussed the structure and principle of the balanced IDM,some experimental results of sample positioning using the new balanced impact drive mechanism in a scanning tunneling microscopy was also provided.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2001年第11期1325-1328,共4页
Acta Photonica Sinica
