摘要
本文描述了大功率 CO_2激光辐照 SiH_4+NH_3的快速流动气体合成 Si_3H_4超细粉末的实验,揭示了激光谱线变化对合成反应的影响。讨论了粉末红外吸收光谱的畸变现象等。
The experiment of synthesizing superfine Si_3N_4 powder by using the CW CO_2 laser to irradiate the fast flowing gases (SiH_4 +NH_3) is described.The effect of the laser spectrum variation on the synthesis reaction has been revealed.The deformation phenomenon of the infrared absorption spectrum of the powder has been discovered.
出处
《激光技术》
CAS
CSCD
1991年第4期220-224,共5页
Laser Technology
