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溶胶-凝胶法制备二氧化锡薄膜 被引量:10

Preparation of SnO_2 Thin Films by Sol-Gel Method
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摘要 以无机物 (SnCl4 ·5H2 O)为前驱物采用溶胶 凝胶技术、浸渍涂布法制备二氧化锡薄膜。研究了凝胶的脱水与晶化过程 ,得到经 6 0 0℃热处理后凝胶晶化完整。同时对不同粘度的涂布液与成膜厚度以及不同提拉速度与成膜厚度的关系进行研究 ,得到较好的直线关系。膜厚与提拉速度的关系式为t≈V0 The SnO 2 thin films were prepared by Sol Gel technique and dip coating method using colloidal particles derived from an inorganic salt(SnCl 4·5H 2O)as precursor Well crystallized SnO 2 thin films were obtained about 600℃ after dehydration When the content of SnO 2 and the pulling rate are fixed there is a well linear relationship between the thickness of SnO 2 thin films and the different viscosities of the dipping solutions And when the content of SnO 2 and PVA used as viscosity adjustment agent are fixed there is also a well linear relationship between the thickness of SnO 2 thin films and the pulling rates The mean slope of the straight lines is 0 58,which is well in line with the reported scale The thickness(t)of SnO 2 thin films and the pulling rates(v)of substrates from dipping solutions were correlated with an expression of t≈V 0 58 .
出处 《硅酸盐通报》 CAS CSCD 2001年第1期6-9,共4页 Bulletin of the Chinese Ceramic Society
关键词 溶胶凝胶法 二氧化锡薄膜 厚度 浸渍涂布法 sol gel method tin oxide thin film thickness
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