摘要
采用溶胶-凝胶法在石英衬底上制备掺铟氧化锌薄膜,研究不同退火温度对薄膜结构及发光性能的影响.结果表明,掺铟氧化锌薄膜仍为六角纤锌矿结构的ZnO相,在大于450 nm的波段薄膜样品的透射率都较高;随着退火温度的升高,透射率先增后减,600℃时达到最大;薄膜样品的光学带隙都小于纯ZnO的理论值(3.37 eV),且随退火温度的升高呈先减后增趋势;样品的结晶度与发光强度随着退火温度的升高而增强.
Indium-doped ZnO thin films were prepared on quartz substrates by using sol-gel method, the results were as follows： in- dium-doped ZnO thin films exhibited a hexagonal wurtzite ZnO phase structure; in the wavelength of above 450 nm, thin films showed high optical transmittance which was related to the annealing temperature of samples; optical transmittance of thin films first- ly increased, reached the maximum vaule under sample annealing temperature of 600 ℃, then decreased. The band gaps of all sam- ples were lower than the theoretical value of pure ZNO（3.37 eV）. With the increase of annealing temperature the band gaps of sam- pies first decreased and then increased. The degree of crystallinity and the luminous intensity of the sample increased with the in- crease of annealing temperature.
出处
《福建农林大学学报（自然科学版）》
CSCD
北大核心
2012年第6期650-654,共5页
Journal of Fujian Agriculture and Forestry University:Natural Science Edition
基金
福建省自然科学基金资助项目(2011J05122)
关键词
掺铟氧化锌
溶胶-凝胶法
半高宽
光学带隙
indium-doped ZnO
sol-gel method
full width at half maximum
optical band-gap
作者简介
吴义炳（1974-），男，讲师．研究方向：光电子薄膜材料．Email：wyb．2009@163．com．
