摘要
采用直流磁控溅射法,在玻璃基板上制备了用于显示器视窗保护玻璃的半透明镍膜,测定了不同溅射条件下所得镍膜的表面粗糙度、透过率及厚度,讨论了溅射气压、溅射功率、行车速度等对薄膜性能的影响。结果表明,薄膜的表面粗糙度随溅射功率的增加而增大,控制溅射气压、溅射功率和行车速度为一定值,可以得到透过率为50%的半透镍膜。
Semitransparent nickel coating used for cover lens of display was deposited on glass substrate by DC magne- tron sputtering, the variation of surface roughness, transmittance and thickness of the nickel coating obtained with different sput- tering process was tested. The influence of sputtering gas pressure, sputtering power and carrier moving speed on coating proper- ties were discussed. The result shows that the surface roughness of the coating increases along with the increase of sputtering power, the nickel coating with 50% transmittance can be obtained with appropriate sputtering gas pressure, sputtering power and carrier moving speed.
出处
《表面技术》
EI
CAS
CSCD
北大核心
2012年第6期65-67,共3页
Surface Technology
基金
河北省建设厅资助项目(2009-129)
关键词
磁控溅射
半透镍膜
液晶显示
真空镀膜
magnetron sputtering
semitransparent Ni coating
LCD display
vacuum coating
作者简介
韩丽（1978-），女，博士，副教授，主要研究方向为光电薄膜功能材料。
