摘要
通信系统向高频的发展趋势使声表面波(SAW)滤波器技术面临着越来越多的挑战。利用传统材料制作SAW滤波器的中心频率很难达到GHz频段,因此探索在高声速材料基础上制作SAW滤波器成为一种必然趋势。基于高声速材料金刚石设计了IDT/ZnO/金刚石结构的薄膜SAW滤波器,设计了镜像阻抗连接IDT的结构参数,并采用ADS软件对该结构进行了建模仿真。然后,通过ZnO薄膜制备工艺和IDT电极制备工艺,获得了金刚石SAW滤波器样品。最后,采用RF探针台对所制得的样品进行了性能测试和数据分析。测试结果表明,在金刚石厚膜衬底上获得了频率超过1 GHz的SAW滤波器样品。
The fast developments toward high frequency of the communication systems advance more and more challenges for the technology of high frequency surface acoustic wavec （SAW） filters. Generally, the frequency of SAW filters fabricated by the traditional material is not easy to reach GHz level, thus exploring high sound velocity materials to fabricate SAW filters becomes an inexorable trend. Based on the diamond material with high sound velocity, the film SAW fil- ters of interdigital transducer （IDT）/ZnO/ diamond were designed. Besides that, the sturcture parameters of the image impedance connection IDT were designed, and the structure was simula ted by adopting the ADS software. By the ZnO film fabrication technology and IDT fabrication technology, the diamond SAW filters samples were obtained. Finally, the SAW filters samples were measured using the RF probe, and the test data were analysed. The test results show that the frequency of SAW filters sample using IDT/ZnO/diamond structure is more than 1 GHz.
出处
《微纳电子技术》
CAS
北大核心
2012年第10期662-666,692,共6页
Micronanoelectronic Technology
基金
中国工程物理研究院科技发展基金重点课题(2008A0403016
2010A0302013)
作者简介
陈颖慧（1987-），女，甘肃白银人，硕士研究生，主要研究方向为微电子机械系统（MEMS）；
通信作者：高杨（1972-），男，四川绵阳人，博士，研究员，硕士生导师，中国微米纳米技术学会理事．主要研究方向为微电子机械系统（MEMS）和机电引信，承担863、国防预研、国防基础研究、部级基金等科研项目10余项．获部级一等奖1项、部级二等奖1项、部级i等奖4项，授权或申请专利15项．发表学术论文60余篇。其中SCl和EI检索30余篇，指导硕士生20余人，主讲《微系统导论》研究生课程。E-mail：gaoyang@caep．ac．cn
