摘要
用纳米氮化钽粉末烧结制备了氮化钽烧结体,分析了烧结体的物相结构,研究了形成液种类、形成液浓度、温度、电流密度以及赋能电压等条件对氮化钽阳极氧化膜电性能的影响。结果表明,该烧结体是由纯氮化钽组成的,氮化钽阳极块体阳极氧化过程的最佳赋能工艺:磷酸溶液浓度0.01%,形成液温度55℃,电流密度40mA/g,形成电压小于16V。
Sintered tantalum nitride anodes were prepared with tantalum nitride nanopowders.The sintered anode slugs were examined by XRD.The effects of formation solution in terms of its variety,concentration and temperature,current density and formation voltage on electrical characteristics were studied.The results show that the anode slugs are made of pure tantalum nitride phase,and the optimum anodizing process conditions including H3PO4 concentration of 0.01%,temperature of formation solutions of 55 ℃,current density of 40 mA/g and the formation voltage of less than 16 V.
出处
《有色金属（冶炼部分）》
CAS
北大核心
2012年第9期51-54,共4页
Nonferrous Metals（Extractive Metallurgy)
基金
国家自然科学基金资助项目(51004008
21071014)
国家基础研究发展计划(973计划)项目(2007CB613301)
关键词
氮化钽烧结体
电性能
阳极氧化
sintered tantalum nitride anodes
electrical characteristics
anodization
作者简介
刘莲云（1965-），女，河北人，博士
通讯作者：朱鸿民（1962-）,男，教授
