摘要
通过W(CO)6化学气相沉积(MOCVD)工艺,在碳纤维表面沉积得到了碳化钨膜材料,研究了碳纤维表面沉积碳化钨膜的工艺条件。结果表明:在400℃沉积温度下沉积时间15min,一定浓度的W(CO)6可解离沉积在碳纤维表面形成致密碳化钨膜;膜层厚度0.4μm,物相为WC1-x相,与碳纤维基体结合强度高。DTA分析表明,复合碳纤维的抗热氧化性能得到了明显提高。
Carbon fibers were coated with tungsten carbide film by metal organic chemical vapor deposition method with a precursor of hexacarbonyl tungsten,and the processing parameters of depositing tungsten carbide onto carbon fiber were studied.The results show that the surface of carbon fibers is covered with a dense and regular tungsten carbide film which is deposited at temperature of 400℃with holding time of 15min.The thickness of as-deposited film is about 0.4μm,and the phase of film is WC1-x.There is good adhesion between the coated film and carbon fiber.The DTA analysis results indicate that the thermal anti-oxidization properties of carbon fiber composites are improved significantly.
出处
《粉末冶金技术》
CAS
CSCD
北大核心
2012年第3期214-218,共5页
Powder Metallurgy Technology
基金
国家高技术研究发展计划资助项目(2009AA03Z116)
作者简介
李一（1968-），男，高级工程师，在职博士。E—mail：lyhost@sina．com
