摘要
分析了不同预处理方式下缺陷上的激光能量的覆盖特点。理论分析表明,相同预处理效率下,单步预处理缺陷上激光能量覆盖率优于多步预处理。实验研究了电子束蒸发制备的HfO2/SiO2多层高反膜的激光预处理,结果发现单步预处理后薄膜的单脉冲激光损伤阈值比相同效率的4步预处理后薄膜的单脉冲激光损伤阈值要好。采用最高能量密度为112%激光损伤阈值的5步预处理后,光学薄膜的激光损伤阈值提高了83.5%。
The laser energy covering the defect in laser-conditioning process is studied,and its characteristics in different laser-conditioning processes are analyzed.Theoretical analysis shows that,with the same conditioning efficiency,the laser energy coverage rate of single-step conditioning is better than that of multi-step conditioning.From laser-conditioning experiments of the HfO2/SiO2 high reflective coating deposited by E-beam evaporation,we know that the LIDT（laser-induced damage threshold） enhancement of the coating after single-step conditioning is better than that of the coating after multi-step conditioning with the same conditioning efficiency.Using the highest irradiating energy of 112%E0,the LIDT of coating after 5-step conditioning is 183.5% of that before conditioning.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2012年第6期1385-1390,共6页
High Power Laser and Particle Beams
关键词
激光预处理
缺陷
能量覆盖
高反射膜
laser-conditioning
defect
energy coverage
high reflective coating
作者简介
作者简介：代福（1977-），男，博士，主要从事激光损伤、激光预处理技术及机理研究；ioe_daif@126．com
