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基于Parylene膜的法-珀干涉型光纤超声水听器 被引量:3

Fabry-Perot Interferometric Fiber-optic Ultrasonic Hydrophone Based on Parylene Film
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摘要 针对高强度聚焦超声(HIFU)声场测量,提出并研究了一种基于Parylene膜的法-珀干涉型光纤水听器。采用真空气相沉积法在光纤的端面蒸镀Parylene膜构成光纤水听器的法-珀腔,分析了光纤水听器的传感原理和解调原理,建立了HIFU声场检测的实验系统。实验结果表明,基于Parylene膜的法-珀干涉型光纤水听器能准确传感超声信号,其输出与换能器驱动电压的非线性度小于0.01,且与聚偏氟乙烯(PVDF)针式水听器的测量结果基本一致。 A Fabry-Perot interferometric fiber-optic hydrophone formed by Parylene coating for measuring high intensity focused ultrasound (H1FU) is presented. The Fabry-Perot cavity of the fiber-optic hydrophone is formed by coating a Parylene film on the cleaved end of a single mode fiber by the vacuum vapor deposition method. The sensing principle and the demodulation principle of the Fabry-Perot interferometric fiber-optic hydrophone has been dis- cussed. An experiment system of HIFU acoustic field has been fabricated. The experimental results show that the proposed Fabry-Perot interferometric fiber-optic hydrophone can accurately sense the ultrasonic signals,the non-line- arity of the output voltage of the fiber-optic hydrophone relative to the voltage applied to the ultrasonic transducer is less than 0.01, and the results sensed by the developed Fabry^Perot interferometric fiber-optic hydrophone agree with those sensed by the PVDF needle hydrophone.
出处 《压电与声光》 CSCD 北大核心 2012年第3期355-358,共4页 Piezoelectrics & Acoustooptics
基金 重庆市科委自然科学重点基金项目(CSTC 2009BA5072)
关键词 光纤传感器 法-珀干涉 Parylene膜 水听器 高强度聚焦超声 fiber-optic sensor Fabry-Perot interferometry Parylene film hydrophone high intensity focused ultrasound
作者简介 张洁(1985-),女(彝族),贵州毕节人,硕士,主要从事生物医学工程的研究。E—mail:zhangj6647@163.com。 通信作者:王代华,E-mail:dhwang@cqu.edu.cn。
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