摘要
透射电子显微镜(transmission electron microscopy,TEM)在工作状态时要求精确的合轴,电子枪作为TEM电子光学系统主要部件之一,要求电子源必须与镜筒中整个电磁透镜系统严格合轴,否则会造成到达样品的电子束流减少,引入球差等不良影响。在操作中灯丝像的对称性是判断电子枪是否合轴的重要判据。研究了TDX-200透射电子显微镜灯丝像的调节过程,给出了透射电子显微镜灯丝像的具体调节步骤,并通过课题室透射电子显微镜TDX-200进行了实际验证。
In working status,Transmission electronic microscope（TEM） requires precise alignment.As a major component of electronic microscope electronic optical system,electron gun must be strictly alignment with magnetic lens system,otherwise the electron beam reaching sample will be reduced and spherical aberration will be brought in.In operation the symmetry of image of TEM filament can be used to judge whether the electron gun has been in alignment.This article mainly researches the modulation technology for the image of TEM filament.According to the actual modulating process,combined with reference documents,the modulation technology for the image of TEM filament is summarized and verified by TDX-200.
出处
《国外电子测量技术》
2012年第4期72-75,共4页
Foreign Electronic Measurement Technology
基金
国家科技支撑计划课题(2006BAK03A24)
关键词
透射电子显微镜(TEM)
电子源
照明系统合轴
灯丝像
transmission electron microscopy（TEM）
electronic source
illumination system alignment
image of filament
作者简介
董全林,1963年出生,研究员,博士生导师.E-mail：dongquanlin@buaa.edu.cn
