摘要
详细地介绍了用于分频的闪耀光栅设计方法 ;推导了影响元件性能的衍射效率公式 ;并研究了纵横向工艺误差对其衍射行为的影响。模拟结果显示在 8%和 5%纵横向相对误差范围内 ,该闪耀光栅具有良好的分色效果。
A design method used in blazed grating for frequency division is presented in the paper in detail.A diffraction efficiency equation affecting element function is derived.The influence of longitudinal and transverse technological errors on diffraction action is studied.The simulation results show that within the range of 8% longitudinal and 5% transverse relative error the blazed grating has a good dichroic effect.
出处
《光电工程》
EI
CAS
CSCD
2000年第2期39-42,51,共5页
Opto-Electronic Engineering
基金
国家 8 63 -4 16高技术研究计划资助项目
关键词
闪耀光栅
衍射
刻蚀误差
分频
设计
Blazed gratings,Diffraction efficiency,Etching errors.
