摘要
针对传统加工方法很难实现微机电系统(Micro electromechanical systems,MEMS)零部件高质量加工的问题,在微细加工技术研究基础上,提出采用飞秒激光双光子聚合加工技术加工标准渐开线微齿轮的方法。采用钛蓝宝石激光器自行搭建的飞秒激光双光子加工系统,能够输出波长为800 nm的飞秒激光用于双光子聚合加工,利用AutoCAD软件设计标准渐开线微齿轮,通过理论和试验两种方法研究激光功率与单个固化点尺寸之间的关系,进而研究扫描步距与加工精度和表面粗糙度之间的关系,结果表明,激光功率越小,加工分辨率越高;扫描步距越小,加工变形越大,但表面质量提高。采用优化后的加工工艺参数加工出高质量的标准渐开线微齿轮,其表面粗糙度Ra27.66 nm。因此,飞秒激光双光子加工技术能够为微齿轮或其他MEMS零部件的加工提供一条有效途径。
Pointing to the problem that it is hard for traditional machining methods to manufacture the parts of micro electromechanical systems（MEMS） with high quality,the method that standard involute micro gear is fabricated by polymerization fabrication technique of two-photon of femtosecond laser is provided based on the research of micro fabrication techniques.Fabrication system of two-photon of femtosecond laser is set up by using Ti-sapphire laser.Femtosecond laser whose wavelength is 800 nm may be output by the system for two-photon polymerization fabrication.Standard involute micro gear is designed with AutoCAD software.The relationship between laser power and the size of single voxel,the relationship between scanning step and the fabrication precision,surface roughness are researched through theory analysis and experiment.The results indicate that the machining resolution is higher when the laser power is smaller.When the scanning step is too smaller,the deformation is bigger,but the surface roughness is better.High quality standard involute micro gear with surface roughness Ra27.66 nm is fabricated with optimized fabrication parameters.Therefore,the fabrication technique of two-photon of femtosecond laser provides an effective way for fabrication of micro gear or the other MEMS parts.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2011年第23期193-198,共6页
Journal of Mechanical Engineering
基金
浙江省自然科学基金(Y1110027)
浙江省科技计划(2009C31016)资助项目
关键词
双光子
飞秒激光
微齿轮
微细加工
Two-photon Femtosecond laser Micro gear Microfabrication
作者简介
孙树峰，男，1968年出生，博士研究生，副教授。主要研究方向为精密与超精密微细加工技术、数控技术和CAD／CAM技术。E-mail：shufeng2001@163．com
王萍萍，女，1981年出生。主要研究方向为数控技术和CAD／CAM技术。E-mail：wang_pp2001@163．com
薛伟（通信作者），男，1961年出生，博士，教授。主要研究方向为微纳制造技术。E-mail：xw@wzu．edu．cn
