摘要
真空蒸发沉积薄膜再经热氧化获得n型掺La的ZnO和SnO2薄膜(玻璃衬底).研究掺La含量与热氧化工艺对薄膜的物相结构、表面形貌和气敏特性的影响.实验给出:掺La使薄膜表面颗粒细化,随La含量增加,ZnO,SnO2薄膜平均晶粒尺寸均增大.掺La可明显降低2种薄膜的气敏工作温度.相比之下,掺La对ZnO薄膜的灵敏度改善明显优于SnO2。在体积分数为6×10-3的还原性气体丙酮、乙醇中,ZnO∶La(3%)薄膜对二者的灵敏度分别达36,23;SnO2∶La(3%)对丙酮灵敏度可达15,掺La(5%)SnO2薄膜对乙醇的灵敏度也有一定的改善。
La-doped n-type ZnO and SnO2 thin films are prepared by method of vacuum evaporation on glass substrates.The effects of doping content and heat-oxidation on the structure,surface topography and sensitive characteristics are investigated.The results show that surface is refined after La-doping.With the increasing doping amount,the average grain size of ZnO and SnO2 thin films increased as well.In addition,the operating temperature for gas sensing is reduced significantly by the way of La-doping.In contrast with SnO2 doping,the La-doped ZnO films show better gas sensing property.When environed in reducing gas environment（acetone,ethanol）with volume fraction of 6×10-3,the sensitivities to acetone and ethanol of 3% La-doped ZnO thin films are 36 and 23;the sensitivity to acetone of 3% La-doped SnO2 thin films is 15.The 5% La-doped SnO2 films show the improvement of the sensing property to ethanol.
出处
《传感器与微系统》
CSCD
北大核心
2011年第7期75-78,81,共5页
Transducer and Microsystem Technologies
基金
内蒙古自治区自然科学基金资助项目(200607010109)
内蒙古自治区高等学校科学研究计划资助项目(NJ05030)
关键词
真空蒸发
LA掺杂
热氧化
ZnO
SnO2薄膜
气敏特性
vacuum evaporation
La-doped
heat-oxidation
ZnO and SnO2 thin film
gas-sensing property
作者简介
董斌华（1985-），男，内蒙古乌兰察布人，硕士研究生，主要从事电子薄膜材料与技术方面的研究。
