摘要
回顾了微机械加工技术的最新进展， 介绍了自由空间微型光学试验平台和光预对准的概念以及微机械加工的光学器件实例。
The recent advances in micromachining techniques are reviewed in this paper.The free space microoptical bench and the concept of optical prealignment as well as micromachined optical devices are introduced.
出处
《半导体情报》
1999年第4期15-21,共7页
Semiconductor Information
关键词
集成光学
集成光电子学
光学开关
微机械加工
Integrated optics Integrated optoelectronics Microelectromechanical device Optical switch
