摘要
为了精确检测大口径非球面面型质量,将CGH作为补偿器应用于凹非球面的离轴全息检测系统中。根据计算全息图的离轴全息检测系统检测凹非球面的基本原理,分析了离轴CGH的计算、制作过程,实现了对口径为150 mm,近轴半径为1 499.7 mm,非球面系数为—1的凹非球面镜的检测。实验结果与轮廓仪检测结果吻合得很好。
Compute-generated hologram is used as a compensator in off-axis holographic detection system to test large concave aspheric surface more precisely. According to the principle of the off-axis holographic detection system using CGH, the calculation and making of CGH are analyzed. The measurement of concave aspheric surface with an aperture of 150 mm, spherical radius of 1 499.7 mm and aspheric coefficient of -1 is performed. The measurement result is coincident with the result of profilograph.
出处
《光学与光电技术》
2011年第1期60-63,共4页
Optics & Optoelectronic Technology
基金
昆明理工大学科学研究基金(KKZ2200807064)资助项目
关键词
非球面检测
计算全息图
凹非球面
离轴
相移
aspheric surface testing
computer-generated hologram
concave aspheric surface off-axis
phase shift
作者简介
王虹（1975-），女，硕士，讲师，主要从事光信息处理方面研究。E-mail：wanghongee@yahoo．com．cn
