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有机硼化物离子渗硼 被引量:1

Plasma assisted Boronizing with Organic Boron Precursors
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摘要 发展了以硼酸三甲脂B(OCH3)3为渗剂的离子渗硼工艺,并探讨了基体温度、处理时间以及气相中渗剂浓度对硼化铁层的影响。渗硼时间在1h以内可得到5μm厚的硼化铁层。一些处理参数会导致在硼化物层上形成硼-碳层,它将起着扩散垒的作用,阻止了硼化物进一步的生长。采用由渗硼剂加入和中断组成的工艺次序能防止该壁垒层的形成。初步的销-盘磨损试验结果表明,与未处理的钢基体相比离子渗硼减少了80%的磨损量。 Abstract A plasma assisted boronizing with trimetly borate, B(OCH 3) 3, chosen as precursor was developed and the influence of substrate temperature, treatment time and precursor concentration in the gas phase on iron boride layers was discussed. Iron boride layers with 5μm thickness were obtained within 1h boronizing time. Some treatment parameters led to boron carbon coating above the boride layer which acts as a diffusion barrier and prevents a further growth of the boride layer. It could be shown that a process sequence consisting of treatment (with boron precursor addition) and pause (no boron precursor addition) is suited to prevent the formation of the barrier coating. First wear tests, simulated with the pin on disk test, resulted in 80% less material loss in case of plasma boronized layers compared to untreated steel substrates.
出处 《机械工程材料》 CAS CSCD 北大核心 1999年第4期16-21,共6页 Materials For Mechanical Engineering
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