摘要
利用零补偿器实施离轴非球面元件面形的干涉检测中,为了实现反射镜的高准确度检测,对其干涉结果中的误差信息进行了分析.根据零补偿器的补偿原理,提出一种新的调整误差分离方法,建立了离轴非球面补偿检验的调整误差分离模型,并利用该模型对一块离轴非球面反射镜进行了仿真实验.调整前由调整误差引入的波像差为0.2332λRMS(λ=632.8nm),根据仿真结果调整后的波像差为0.0026λRMS,表明该方法具有较高的准确度,可有效提高检测效率.
Based on the principle of null lens,a new method of error-separation was proposed in null testing.A mathematic model was developed to separate misalignment-induced aberration from the test result.The method was used in the simulations of an off-axis aspheric mirror.The wavefront aberration induced by misalignment is 0.0026λRMS（λ=632.8 nm） after the alignment,compared with 0.2332λRMS before the alignment,which reflects that this method has high accuracy and can improve the efficiency of the null test.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2010年第12期2220-2223,共4页
Acta Photonica Sinica
关键词
非球面检测
补偿器
调整误差
计算机辅助装调
Asphere testing
Null corrector
Alignment error
Computer-aided alignment
作者简介
Tel：029—88887671 Email：chenqingfang20060718@126．com CHEN Qin-fang was born in 1982,and received the M. S. degree from Xi＇an Technological University. Now she is a Ph. D. degree candidate at Xi＇an Institute of Precision Optics and Mechanics,CAS, and her research interests focus on optical processing and testing.
LI Ying-cai received the B. S. degree from Zhejiang University in 1967. Since 1968, he has been working at Xi＇an lntitute of Optics and Precision Meehanics,CAS,and also worked at UK Queen＇s Belfast Univerty from 1984 to 1986 and Sydney University from 1995 to 1999 ,as a senior visiting scholar, respectively. Now, he is a research fellow and doctoral supervisor and his research interests focus on optical design.
