期刊文献+

混合式陀螺仪的闭环检测技术研究

Research of Hybrid Gyroscope Closed Loop Detecting Technology
在线阅读 下载PDF
导出
摘要 研究了一种新型的混合式陀螺仪,它既具有实现传统动力调谐陀螺仪较高精度的潜力,又具有硅微陀螺仪体积小、价格低等优点。混合式陀螺仪以电容极板实现差分电容检测和力矩反馈的技术替代传统动力调谐陀螺仪的信号器及力矩器。以再平衡回路技术为基础,建立了混合式陀螺仪闭环检测系统。与开环检测相比,闭环检测系统具有输出信号线性度较好、检测带宽较宽的优点。进行了系统开环和闭环情况下的频率特性仿真。对混合式陀螺仪进行了初步实验,结果验证了方案的可行性。 Described in this paper is a hybrid gyroscope with advantages not only in the potentiality of achieving high precision like the tradition dynamically tuned gyroscope(DTG),but also in small size and low cost like the Silicon Micro-machined Gyroscope(SMG).Instead of using signal converters and actuator in traditional DTG,the hybrid gyroscope uses capacitor plate to achieve the differential capacitive sensing and torque feedback technique.The hybrid gyroscope closed-loop detecting system is based on rebalance loop.The closed-loop detecting system has advantages of better output signal linearity and wider detecting bandwidth compared with open-loop system.The frequency characteristics of the open-loop and closed-loop systems are simulated.Experimental result illustrates that the proposed scheme is feasible.
出处 《传感技术学报》 CAS CSCD 北大核心 2010年第8期1084-1087,共4页 Chinese Journal of Sensors and Actuators
关键词 混合式陀螺仪 检测电路 再平衡回路 闭环 hybrid gyroscope detecting circuit rebalance loop closed-loop
作者简介 朱熙(1987-),男,硕士研究生,主要从事微型仪表及微系统技术的研究,zhuxi960@126.com 黄丽斌(1974-),女,副教授,硕士生导师,主要从事微型仪表及微系统技术,组合导航技术的研究,huanglibin@seu.edu.cn。
  • 相关文献

参考文献9

  • 1Chen Y,Jiao J,Xiong B.A Novel Tuning Fork Gyroscope with High Q-Factors Working at Atmospheric Pressure[J].Microsystem Technologies,2005,11(2/3):111-116.
  • 2Tao Jiang,Anlin Wang,Jiwei Jiao,et al.Detection Capacitance Analysis Method for Tuning Fork Micromachined Gyroscope Based on Elastic Body Model[J].Sensors and Actuators A,2006(128):52-59.
  • 3钟舟,黄丽斌,杨波.硅微机械陀螺仪模拟信号检测技术研究[J].传感技术学报,2009,22(4):495-498. 被引量:9
  • 4Jenkins Lyle J,Hopkins Ralph E,Kumar Kaplesh,et al.Hybrid Wafer Gyroscope[P].U.S:6615681,2003-9.
  • 5曹慧亮,李宏生,王寿荣,等.一种新型的硅片转子调谐陀螺仪[C]//北京:惯性仪表与元件学术交流会论文集,2009.120-125.
  • 6Akios Takada,Ching Biing Yeo,Cheow Tong Cheng,et al.Air bearing for MEMS based motor[P].U.S:7088019,2006-8.
  • 7Murakoshi T,Endo Y,Fukatsu K,et al.Electrostatically Levitated Ring-Shaped Rotational-Gyro Accelerometer[J].Jpn J Appl Phys,2003,42(4B):2468-2472.
  • 8Gindila M V,Kraft M.Electronic Interface Design for An Electrically Floating Micro-Disc[J].J Micromech Microeng,2003,13(4):S11-S16.
  • 9杨波,王寿荣,李坤宇,张玉凤.微机电混合陀螺仪的系统设计与仿真[J].东南大学学报(自然科学版),2009,39(5):951-955. 被引量:2

二级参考文献12

  • 1Yazdi N, Ayazi F, Najafi K. Micromachined Inertial Sensors [C]//Proceedings of IEEE. 1998,86(8):1640-1659.
  • 2Geen G A. Progress Integrated Gyroscopes[J]. Aerospace and Electronic Systems Magazine, 2004,19(11) :12-17.
  • 3Paul War, Waltham, Mass. Electronics for Coriolis Force and Other Sensors[P]. United States Patent, 5481914,1996-1-9.
  • 4杨波.硅微陀螺仪测控技术研究[D].南京:东南大学,2007.
  • 5IEEE Standard Specification Format Guide and Test Procedure for Corolis Vibratory Gyros[S]. IEEE Std.. 1431-2004.
  • 6Murakoshi T, Endo Y, Fukatsu K, et al. Electrostatically levitated ring-shaped rotational-gyro accelerometer [ J]. Jpn J Appl Phys, 2003,42 (4B) :2468 - 2472.
  • 7Gindila M V, Kraft M. Electronic interface design for an electrically floating micro-disc[ J]. J Micromech Microeng, 2003,13 ( 4 ) : S 11 - S 16.
  • 8Acar Cenk, Shkel Andrei M. An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopes [ J ]. Journal of Microelectromechanical Systems, 2005, 14(3) :520-528.
  • 9Chen Yen-Cheng, Closkey Robert T M. A control and signal processing integrated circuit for the JPL-Boeing micromachined gyroscopes [J].IEEE Transactions on Control Systems Technology ,2005,13 ( 2 ) :286 - 300.
  • 10Chen Y, Jiao J, Xiong B. A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure[J ]. Microsystem Technologies,2005, 11 (2/3) : 111 - 116.

共引文献9

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部