摘要
采用溶胶-凝胶工艺在印有梳状银电极的石英玻璃表面制备了不同含量Sn2+掺杂的氧化钛薄膜,通过烧结制得一系列湿敏元件,研究了Sn2+掺杂量、烧结温度和工作频率对薄膜湿敏性能的影响。研究表明,较低的工作频率下元件的湿敏性能较好;Sn2+的加入不同程度地降低了TiO2基薄膜的阻抗值,其中TiO2-15wt%SnO2薄膜表现出最高的灵敏度;薄膜高的湿敏性能与Sn2+掺杂引起的晶粒度变化以及热处理过程中的晶型转变有关。
The Sn^2＋ doped Titania thin films were prepared on the substrates of the quartz glass with the silver comb-like electrodes by the sol-gel method and then a series of humidity sensors were installed by the sintering process. The effects of Sn^2＋ dopant, sintering temperature and work frequency on humidity sensing properties of the films were investigated. Experimental result shows that, a well humidity sensitivity of the sensors was obtained at lower frequency; the addition of Sn^2＋ improved the linearity of impedance vs relative humidity （RH） to some extent. The TiO2-15wt% SnO2 film exhibits the highest sensitivity for the humidity. Moreover, the good humidity sensitivity is due to the change of crystal size caused by Sn^2＋ doped and the crystal transformation in heat treatment process.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2010年第4期903-907,共5页
Bulletin of the Chinese Ceramic Society
基金
国家自然科学基金项目(50562003)
陕西省科技研究发展计划项目(2009K06-26)
陕西省教育厅科学研究计划项目(09JK843)
榆林市科技计划项目(gygg200812)
关键词
氧化钛
薄膜
湿度敏感
离子掺杂
TiO2-SnO2
thin film
humidity sensitivity
ion doping
作者简介
韩志萍（1968-），女，副教授．主要从事材料分析技术方面的研究．E—mail：elong2600@sina．com
