摘要
提出了一种５０μｍ测量范围内，２ｎｍ不确定度、０．５ｎｍ分辨率的二维激光外差偏振干涉仪的设计。其中用声光调制器和稳频Ｈｅ－Ｎｅ激光器获取频差小于２００ｋＨｚ的正交偏振双频激光束，Ｘ和Ｙ二臂偏振干涉仪将采用差分干涉仪，采用相位解调技术进行外差干涉信号的处理。
The design of a 2 D laser heterodyne interferometer with 2nm uncertainty and 0.5nm resolution within 50μm measuring range is proposed in the paper.The acousto optic modulator and frequency stabilizing He Ne laser will be used to obtain an orthogonal polarized frequency laser beam with less than 200 kHz frequency difference.Both polarization interferometers at X and Y axes are differential interferometer.Phase demodulation technology will be used for heterodyne interference signal processing.
出处
《光电工程》
EI
CAS
CSCD
1998年第1期18-22,共5页
Opto-Electronic Engineering
基金
国防科工委"九.五"攻关
关键词
激光干涉仪
位移测量
纳米级技术
光学设计
Laser interferometers,Displacement measurement,Nanotechnology,Optical design.
