摘要
为解决薄膜生产过程中厚度在线检测问题,以提高产品质量和生产效率,对薄膜厚度在线测量系统进行了研究。基于光学三角法测量原理,以ARM920T为核心处理器、嵌入式Linux为操作系统,构造了系统的软硬件平台,并介绍了系统的硬件组成和软件设计方法。实际生产过程应用表明,该系统能够实现薄膜厚度的在线动态检测和非接触测量,具有高速度、高精度、人机界面友好等特点,在微小厚度变化量的检测领域具有广阔的应用前景。
In order to implement online detection in production of thin films to enhance the quality of products and productive efficiency, the online measurement system for thickness of thin films is researched. Based on optical trigonometry principle, ARM920T core processor, and embedded Linux operating system, the hardware and software platforms have been constructed. The composition of system hardware and design method of software are introduced. The application in practical production verifies that the system is able to implement online dynamic detection and non-contact measurement for thickness of thin films. The system features high speed, high accuracy, and user-friendly interface. It posses- ses wide applicable prospects in detection area for small variation of thickness.
出处
《自动化仪表》
CAS
北大核心
2009年第8期61-63,共3页
Process Automation Instrumentation
作者简介
李敏，女，1970年生，现为哈尔滨工业大学控制科学与工程专业在读博士研究生；主要从事检测技术与自动化装置的研究。
