摘要
采用直流磁控溅射法,在光学玻璃衬底上沉积类金刚石(DLC)和掺N类金刚石薄膜(DLC:N)。用喇曼光谱、X射线光电子能谱(XPS)、傅里叶红外光谱(FTIR)等研究分析了所制备薄膜的微观结构。喇曼光谱的结果表明,掺N类金刚石膜仍具有典型的类金刚石膜结构,在类金刚石薄膜中掺N不仅有助于提高膜中sp3/sp2的比例,而且还能阻止sp2键向石墨相的转化,稳定并优化薄膜的类金刚石属性。FTIR表明,薄膜中N与C原子形成了C—N、CN及C≡N等键合方式。XPS谱表明,掺N类金刚石膜中除了C和N元素外,还出现了少量的O元素,而C1s和N1s的解谱显示,掺N后的类金刚石膜中的C、N结合能发生了明显的移动,由计算得出薄膜中N的含量为13.5%。薄膜的表面形貌图(AFM)表明,在类金刚石薄膜中掺N能够改善其表面形貌。
Diamond-like carbon （DLC） film and N-doped diamond-like carbon （DLC：N） film were deposited on optical glass by direct current magnetron sputtering. Raman spectroscopy, Fourier transform infrared spectroscopy （FFIR） and X-ray photoelectron spectroscopy （XPS） were used to analyze the microstruetures of the DLC ： N film. Raman spectra shows that the DLC ： N film still has typical structure of DLC films and that introducing N2 into DLC films, it contributes to enhancing the ratio of sp^3/sp^2 in DLC films, and prevents sp^2 from changing to graphite phase. The FTIR spectra reveals that N atoms in the films are found combined with carbon atoms as C--N, C=N and C = N bonds. XPS spectra shows that a little oxygen exists in the DLC：N film together with visible carbon and nitrogen, and Gaussian fittings curves of Cls and Nls imply that the binding energy of C atoms and N atoms moves obviously, The quantitative calculations reveal that the N content in DLC： N films is 13.5%. The AFM shows that doping N into DLC films helps improving their surfaces.
出处
《半导体技术》
CAS
CSCD
北大核心
2009年第8期770-774,共5页
Semiconductor Technology
基金
湖南省自然科学基金资助项目(07JJ3010)
关键词
直流磁控溅射
类金刚石薄膜
微观结构
结合能
direct current magnetron sputtering
diamond-like carbon film
microstructure
binding energy
作者简介
杨兵初（1957-），男，湖南石门人，教授，博士，主要从事低维材料结构和性能研究。
