摘要
针对目前工程领域中亟待解决的三维曲面轮廓的精密测量问题，研制了具有纳米级轴向分辨力的光瞳滤波式激光偏振光差动像散传感器（PLDAP）。该传感器基于像散检测原理，利用位于两柱面镜焦前、焦后等距放置的两探测器上的光斑形状信号差动相减和光强归一化处理得到聚焦误差信号，对被测表面进行高精度双极性绝对测量，可用于大倾角表面的测量。PLDAP中，偏振差动光路布置光强归一化技术的采用，有效抑制了环境光波动、光源波动、物体表面光学特性以及光学器件间多次反射对测量结果的影响，显著提高了像散检测技术的抗干扰能力。实验表明：当测量物镜采用数值孔径NA=0．65时，PLDAP测量范围达±10μm，分辨力优于5nm，可测倾角20°，稳定性优于2％。该传感器为非连续表面轮廓的跟踪、瞄准测量提供一种新的技术途径。
In order to achieve the precise measurement of three - dimensional surface contours, pupil filtering laser differential astigmatic probe （PLDAP） is developed with axial resolution at nm level. PLDAP based on the principle of astigmatic measurement uses defocused signal obtained through the differential subtraction of two focal error signals and normalization of the detected intensity received from two detectors, which are placed at the s^ne distance before and behind the fecal plane of two cylindrical lenses, to achieve the high accuracy and bipolar absolute measurement of a large obliquity surface. The differential astigmatic polarized light path arrangement and intensity normalized technique used in PLDAP effectively suppress the bad effect on measurements caused by the disturbance of hght source and ambient light in intensity, multi- reflection among optical dements and variation of optical property for the measurement surface, and obviously improve the anti- interference capability. Experimental results indicate that PLDAP developed has a resolution of better than 5 nm and a measurement range of ± 10μm when the parameter of measuring lens used is NA = 0.65, and its stability is better than 2% and used for the surface with tilt angle of 20°. It can therefore be concluded that the technique provides a new technique approach for the absolute measurement and aiming trigger of discontinuous surface profiles.
出处
《计量学报》
EI
CSCD
北大核心
2008年第B09期131-135,共5页
Acta Metrologica Sinica
基金
国家自然科学基金（60708015）
高等学校博士学科点专项科研基金（20050213035）
新世纪优秀人才支持计划（NECT-05-034）
作者简介
邱丽荣（1974-），女，黑龙江绥滨人，北京理工大学讲师，主要从事光电检测技术和超分辨共焦传感技术研究。qiugrass@126.com
