摘要
由于光学塑料在耐热性、耐吸湿性和表面强度等方面的特性比光学玻璃差,所以在光学塑料棱镜表面上镀制金属反射膜存在着金属膜层和塑料棱镜表面附着性能差的问题,镀膜后的塑料棱镜不易达到使用的技术要求。本文通过对镀膜材料和光学塑料基体的特性分析,提出了一种实用的介质加金属三层反射膜系。基于这种膜系采用了等离子辅助镀膜技术和石英晶片监控膜厚的方法,并且针对塑料棱镜蒸镀的特殊性,严格控制蒸镀条件中的有关参数,形成了一套稳定的蒸镀工艺。实验结果表明,光学塑料棱镜镀制金属反射膜可以解决膜层性能差的问题,满足光学产品的技术要求,实现批量生产。
Due to the lower heat resistance, moisture absorption and surface strength of plastic prism than those of optical glass, the strength of bonding the metallic reflecting film to the plastic prism surface will decrease, thus causing the problem that the plastic prism with reflecting film deposited is hard to meet its technical requirements. Analyzing the properties of both film materials and optical plastic as substrate, a 3-layer film is proposed including A1 layer, intermediate medium layer and outer protective layer. It was deposited on plastic prism surface via a plasma-aided coating process with a quartz chip to monitor film thickness. According to the special requirements for the evaporation coating of plastic prism, the parameters relevant to evaporation coating were strictly controlled to form a stable evaporation process. Experimental results showed that the problem of poor quality of metallic reflecting thin film deposited on optical plastic prism can be solved well to meet the technical requirements in batch production.
出处
《真空》
CAS
北大核心
2008年第6期29-31,共3页
Vacuum
关键词
塑料棱镜
离子源
镀膜技术
plastic prism
ion source
coating process
作者简介
孙可（1956-），男，安徽省安庆市人，高级工程师。
