摘要
光开关是光网络中实现光交换的核心器件。硅基波导光开关作为一类重要的开关器件,具有体积小、开关速度快、兼容性好等优点。近年来随着硅基波导制作技术的成熟,硅基波导光开关及开关阵列的研究日益受到人们的重视。文章介绍了SOI(silicon-on-insulater)光波导、聚合物光波导和SiO2光波导等三类常见的硅基波导在光开关及开关阵列方面的一些研究进展。
Optical switches are key components in optical network to implement optical exchanges. Silicon-based waveguide optical switches are important switch devices because of small bulk ,fast switch speed,and good compatibility. Recent years, with the maturation of facture technology of silicon-based waveguides, the research on silicon-based waveguide optical switches and switch arrays has attracted more and more attentions. In this paper,the recent develop- ments in optical switches and switch arrays based on three kinds of silicon-based waveguides, including SOl（ silicon- oll-insulater）, polymer and SiO2, are reviewed.
出处
《激光与红外》
CAS
CSCD
北大核心
2008年第11期1073-1076,共4页
Laser & Infrared
关键词
光开关
光波导
SOI
聚合物
SIO2
optical switch
optical waveguides
SOI （ silicon-on-insulater ）
polymer
SiO2
作者简介
陈媛媛（1979-），女，博士，讲师，主要从事半导体光波导器件的研究。E-mail：chen．yy@163．com
