摘要
采用一种新的双电测组合法测试半导体材料的方块电阻和体电阻率,改进了传统直流四探针测试法。以凌阳SPCE061A单片机为控制核心,通过软件设计和硬件电路相结合,设计了一款集半导体导电类型判别与方块电阻、电阻率测量于一体的测试仪。运用冗余通道法、PID算法,提高了系统的测量精度和智能化水平。实际运行结果表明:测量结果与探针间距无关;能自动修正边界影响和自动选择量程,较好地满足了生产与教学需要。
A new two-sounding combination of semiconductor materials testing sheet resistance and resistivity, Improved the traditional four-probe test. Using Sunplus SPCE061A as the control core, combining software design and hardware designed a set of testing equipment to judging the conductivity type, sheet resistance and resistivity of semiconductor. Using redundant channel, PID algorithm improved the measurement accuracy and intelligent level. Actual operating results show： the measurement results have nothing to do with the probe space, can automatically correct boundary effects and automatically choice range, can meet the needs of production and teaching better.
出处
《国外电子测量技术》
2008年第9期1-3,7,共4页
Foreign Electronic Measurement Technology
基金
国家级大学生创新性实验计划(521611035)
关键词
双电测组合法
方块电阻
电阻率
导电类型
SPCE061A
double electrical measurement combination
sheet resistanee
resistivity
conductivity type
SPCE061A
作者简介
王琨（1987-）男，本科生，国家级大学生创新性实验计划项目负责人。
