摘要
介绍了近年来发展的纳米云纹法及其新的应用。这些方法是基于原子力显微镜、扫描隧道显微镜和透射电子显微镜的原理提出来的。纳米云纹法能够对物体的微/纳观变形提供定量的分析。详述了这些方法的测量原理和实验技术,并进行了新的应用研究。实验结果论证了这些方法的可行性,并证实了这些方法具有纳米级的位移测量灵敏度。
Some novel nano-moiré methods have been developed.An introduction of these new methods is offered,which can be realized under the atomic force microscope,scanning tunneling microscope,as well as the transmission electron microscope.These nano-moiré methods are able to offer quantitative analysis to nano-deformation of object.The measurement principles and experimental technique of these methods are described.A new digital nano-moiré technique is proposed.Some typical applications to these methods are discussed.The experimental results demonstrate the feasibility of these methods and also verify the methods can offer a high sensitivity for displacement measurement with nano-meter spatial resolution.
出处
《光学技术》
CAS
CSCD
北大核心
2008年第2期294-297,共4页
Optical Technique
关键词
高分辨率显微镜
纳米云纹
纳米测量
晶格
electronic microscope
nano-moiré
nano-metrology
crystal lattice.
作者简介
刘战伟（1973-），男，河南省人，北京理工大学理学院力学系讲师，博士，主要从事实验力学方面的研究。 E-mail：liuzw@bit．edu．cn
