摘要
从应用需求出发,介绍了微水导激光划片工艺的主要原理和特点;对其关键工艺机构中的光学聚焦系统、激光在水柱中的全反射传播、激光系统、压力水腔和喷嘴组成的光液耦合器等原理进行了简单分析和介绍;对微水导激光划片工艺的应用前景进行了总结和展望。
The principal principle and special features of the water-jet-guided laser scribing technology is introduced by application in demand in this paper, and the primary principle of optical focusing system, the reflecting transmitting of laser light through water beam, the laser system, the photo-liquid coupling mechanism buildup by pressure water chamber and nozzle etc are analyzed simply and introduced. In the end, the application prospects of water-jet-guided laser scribing technology is summarized and presented.
出处
《电子工业专用设备》
2008年第3期27-31,49,共6页
Equipment for Electronic Products Manufacturing
关键词
微水导激光
光液耦合
划切
微水柱
热熔效应
超薄晶圆
Low—K介质层
LED衬底
Water-Jet-Guided Laser
Photo-Liquid Coupling
Scribing
Water Beam-Riding
Heading Fuse Effect
Ultra-Thin Wafer
Low-k Dielectric Layer
LED Substrate
