摘要
采用能陷理论对石英谐振式力传感器的谐振器进行了分析和设计,通过基于基频的传感器和基于三次谐波的传感器的性能分析,提出了采用三次谐波切角的AT切谐振器,并合理设计晶片及电极参数,可达到对非谐波及低次谐波的抑制作用;证明了基频传感器,尤其是三次谐波传感器工作于三次谐波比工作于基频时有更优性能。
This paper analyses and designs the quartz resonators and sensors on the basis of energy trapping theory. By analyzing the features of the fundamental-overtone sensors and the third-overtone sensors, it's presented that the inharmonic and low order harmonics can be damped if we apply the AT-cut resonators with cut angles for third-overtone and appropriately design the coefficients of quartz plates and electrodes. Both the theory and experiments approve that fundamental sensors, as well as third-overtone sensors which is more significant working at thir-dovertone sensors displays better performance than those working at fundamental-overtone.
出处
《传感技术学报》
CAS
CSCD
1997年第1期23-29,共7页
Chinese Journal of Sensors and Actuators
关键词
石英谐振式
能陷理论
基频
谐波
力传感器
quartz resonator sensor energy trapping theory third-overtone fundamental-overtone
