摘要
采用ＣＨ＿４－Ｈ＿２－Ｏ＿２微波等离子体化学气相沉积法在硬质合金表面沉积金刚石薄膜，研究了ＴｉＣ中间过渡层对金刚石薄膜沉积效果的作用及粘结机理。结果表明在相同沉积条件下ＴｉＣ中间过渡层可以显著提高硬质合金表面沉积金刚石薄膜的生长速率，而且还可提高金刚石薄膜与基体的结合力。
A diamond film deposited on hard-metal was obtained by microwave plasma chemical vapor deposition of a methan-hydrogen-oxygen gas mixture. The effect of TiC intermediate transition layer on the deposition process of diamond film, and bonding mechanism had been studied. The result of research showed that TiC intermediate transition layer evidently improves the growth rate and hardness of the diamond film deposited on the surface of hard-metal under the same deposition conditions, it also increases the bonding strength between diamond film and substrate.
基金
国家教委博士点基金
关键词
硬质合金
化学气相沉积
金刚石
碳化钛
hard-metal,TiC intermediate transition layer, microwave plasma chemical vapor deposition, diamond film.
