摘要
以经过结构参数优化后的微机械陀螺仪为研究对象,针对其梳齿驱动器、悬臂梁和平行板电容器这三种典型结构,分析了影响其结构可靠性的因素,验证了梳齿驱动器结构参数满足了稳定性要求;得到了感测平行板电容器的临界电压,讨论了平行板的弯曲变形的影响;为保证悬臂梁的可靠性,限定了陀螺仪的工作量程。
This paper analyzes the reliability for gyroscope and its structure parameters has been optimized. The reliability effection factors of typical structures are researched , such as comb diver, parallel plate capacitor and cantilever. The structure parameters of comb diver meet the stability requirement. The pull--in voltage is get and the curvature affection of parallel plate on capacitor is researched. The range of the measure scale is limited to ensure the reliability of cantilever.
出处
《探测与控制学报》
CSCD
北大核心
2007年第1期72-75,共4页
Journal of Detection & Control
关键词
可靠性
微机械陀螺仪
典型结构
MEMS
reliability
micro-mechanical gyroscope
typical structures
MEMS
作者简介
刘凤丽（1975-），女，辽宁朝阳人，讲师，硕士．研究方向：MEMS可靠性研究与结构设计。
