期刊文献+

乙酰丙酮铟的制备及影响因素 被引量:2

Manufacturing and influene factors of indium-methyl-ethyl-diketone
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摘要 介绍了ITO薄膜重要原料乙酰丙酮铟的制备方法,乙酰丙酮铟一次合成产率99·8%,产品纯度99·95%。 The article pointsed out the manufacturing way of Indium-methyl-ethyl-diketone which was important raw material of ITO thin film. Indium-methyl-ethyl-diketone first synthesizing productivity was 99.80/oo, production purity was 99.95%.
出处 《化工新型材料》 CAS CSCD 北大核心 2006年第10期76-77,85,共3页 New Chemical Materials
关键词 ITO薄膜 乙酰丙酮铟 制备 ITO thin film, Indium-methyl-ethyl-diketone, manufacturing.
作者简介 周健(1966-),男,副教授,工学硕士,主要从事功能材料方面的研究。
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参考文献10

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二级参考文献6

  • 1[1]Chuang J C, Tu S L, Chen M C. Sputtered Cr and reactively sputtered CrNx serving as barrier layers against copper diffusion [J]. J Electrochem Soc, 1998, 145(12): 4290-4296.
  • 2[2]Sundaram K B, Blanchard J. Deposition and annealing studies of indium tin oxide films [A]. Southeastcon '97. Engineering New Century, Proceedings IEEE [C]. 1997: 230-232.
  • 3[3]Muraoka M, Suzuki M, Sawada Y, et al. Sintering of tin-doped indium oxide (Indium-Tin-Oxide, ITO) with Bi2O3 additive [J]. J Mater Sci, 1998, 33(23): 5621-5624.
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  • 5[5]Song K B, Ito H, Naoe M. Magnetic and magneto-optical properties of Tb-Fe-Co/Ta multilayers [J]. IEEE Trans Magn, 1994, 30 (6 Part 1-2): 4407-4409.
  • 6[6]Ahn Y M, Cho B I, Ro M D, et al. Study on magneto-optical TbFeCo thin films magnetron- sputtered from targets with low and high magnetic permeabilities [J]. IEEE Trans Magn, 1997, 33 (5 Part 1): 3271-3273.

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