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矩形波导谐振腔微波化学反应器的研究 被引量:10

The Research of Microwave Chemistry Reactor Made of the Rectangular Waveguide Resonator
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摘要 改变矩形波导谐振腔微波化学反应器的结构尺寸如:耦合膜片的形状、尺寸,反应管的直径、管壁厚度、材料和位置,利用HFSS软件计算不同结构尺寸反应器的S参数,仿真的最优结果与实验结果一致,得到了最优结构尺寸的反应器.反应管和短路活塞位置会影响反应器内的电磁场分布,因而直接影响微波化学反应器的工作.在反应管位置z0为106mm,短路活塞位置L0为146mm的最优结构尺寸反应器中,反应管以及内部的甲烷气体处在电场最强的位置且场分布均匀,这有利于甲烷得到足够的能量产生放电.仿真结果和我们的实验结果符合较好. HFSS(High Frequency Structure Simulator) was used to calculate the S parameter of the different structural microwave chemistry reactor made of rectangular waveguide resonator, while changing the structure dimension of the microwave chemistry reactor such as shape and dimensions of iris, diameter of reaction tube and thickness of reaction tube wall, material and positions of reaction tube. The optimal simulating results were consistent with experimental results and the optimal structure dimensions of the microwave chemistry reactor were given. The positions of the reaction tube and the plunger affected the distribution of electromagnetic field in microwave chemistry reactor, and hence it directly affected the work of the microwave chemistry reactor. In the optimal structure reactor, where the positions of the reaction tube and the plunger were 106mm and 146mm respectively ,the methane in reaction tube were positioned at the strongest and uniform electric intensity, which made it easier for the methane obtain enough microwave power to discharge. The simulating results were consistent with our experimental results.
出处 《电子学报》 EI CAS CSCD 北大核心 2006年第9期1708-1710,共3页 Acta Electronica Sinica
基金 江苏省"十五"科技攻关项目(No.BE2001034)
关键词 微波化学 矩形波导谐振腔微波化学反应器 HFSS软件 microwave chemistry microwave chemistry reactor made of rectangular waveguide resonator HFSS soft
作者简介 孙永志 男,现为东南大学电子工程系毫米波国家重点实验室博士研究生.研究方向为微波等离子体和微波化学. 杨鸿生 男,教授、博导.1938年1月生于浙江.1981.3~1983.9美国威斯康星大学(Madison)访问学者和合作研究.研究领域为电磁场理论,微波、毫米波高功率电子学和技术,微波等离子体和微波化学.E-mail:hsyang@seu.edu.cn
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  • 1W Tan,T A Grotjohn.Modelling the electromagnetic field and plasma discharge in a microwave plasma diamond deposition reactor[J].Diam Relat Mater,1995,4(9):1145-1154.
  • 2A M Gorbachev,V A Koldanov,A L Vikharev.Numerical modeling of a microwave plasma CAD reactor[J].Diam Relat Mater,2001,10(3-7):342-346.
  • 3M Nagatsu,M Makino,M Tanga.Diagnostics of plasma ball formed in high pressure microwave plasma for diamond film synthesis[J].Diam Relat Mater,2002,11(3-6):562-566.
  • 4E Pleuler,et al.The CAP-reactor,a novel microwave CAD system for diamond deposition[J].Diam Relat Mater,2002,11(3-6):467-471.

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