摘要
表面起伏靶是惯性约束聚变（ＩＣＦ）分解实验中的重要实验用靶。本文报导了采用离子束刻蚀和激光干涉两种方法制备初始微扰振幅和波长分别在几微米和几十微米范围的正弦调制形状；摸索了相应的工艺条件和工艺过程；用台阶仪及光学显微轮廓仪测微加工后的形貌；探讨了调制波长的精确控制与干涉工艺之间的关系。
The surface perturbation target is one of the most important experimental targets for the resolved experiments of inertiai-confinement fusion(ICF).In this paper,we report the preparation of the sine modulated perturbation figures with perturbation amplitude and wavelength of about several and tens of micron respectively with the methods of ion-beam etching and laser interference.The perturbation profiles of the figures were investigated by an alpha-step device and an optical microscopic profiler.Different technological conditions,preparation process and their relationship with the quality of the figures were studied.
出处
《强激光与粒子束》
EI
CAS
CSCD
1996年第4期616-622,共7页
High Power Laser and Particle Beams
基金
国家高技术惯性约束聚变领域资助
关键词
平面靶
正弦起伏
激光干涉
惯性约束聚变
surface perturbation targets,sine perturbation,laser interference,ion beam etching
