摘要
确切知道X射线管激发的原级能谱分布是X射线荧光分析中的一个重要前提,所用能谱分布函数的准确度大大影响了最终的测量结果。提出利用间接测量法,选用合适的参量模型来描述X射线的原级能谱分布。依靠实验测得的厚靶纯元素样品的荧光强度,利用已知的理论公式,建立非线性方程,优化得到参量模型中的参量值。通过比较实验测得的元素的荧光强度值和利用得到的能谱分布函数计算的理论值,证明此种方法是可行的。
A premise of X-ray fluorescence analysis is the determined acquisition of the primary energy spectral distribution emitted by the X-ray tube, and the energy spectral distribution function affects the accuracy of the final measurement greatly. An indirect approach to determine the primary energy spectral distribution of X-ray is derived, which includes relaying on the X-ray fluorescent intensities measured from the pure element sample of the thick target, establishing nonlinear functions with the known theoretical formula and obtaining the parameters in the parameter model through optimization. The comparison of the fluorescent intensity of the elements measured in the experiment and the theoretical value calculated with the valid. energy spectral distribution function proves the approach valid.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2006年第4期634-638,共5页
Acta Optica Sinica
关键词
X射线光学
X射线荧光分析
质量吸收系数
荧光强度
最小二乘方优化方法
X-ray optics
X-ray fluorescence
mass-absorption coefficient
fluorescent intensity
the least-square optimizing method
作者简介
纪新明（1976-），男，山东青岛人，复旦大学微电子系博士研究生，主要从事光学和微机电系统（MEMS）传感器方面的研究。E—mail：xmji@fudan．edu．cn
