摘要
过滤器检漏测试是洁净室的洁净和质量的决定性因素之一,因此本文从上游发尘方式的选择,到上游气溶胶粒径分布、上游气溶胶浓度,等几个方面讨论了上游尘源特性对检漏测试的影响,然后又对受上游气溶胶浓度影响的几个参数进行了论述,并且详尽阐述了它们对检漏的重要意义,以及确定原则。并得出了确定漏点所需要的最小尘粒数的取值范围应在4～6之间的结论。
Air filter leakage test is one of the most critical control points of the cleanroom cleanliness and quality. This paper discussed the leak testing influence aroused by the characteristic of the upper stream particulate from the particle size distribution of the upper stream aerosol, the concentration of upper aerosol and so on. Then the paper discussed several parameters that were affected by the concentration of upper stream aerosol, expounded the meaning of the parameters to determine leakage and made sure the principle to these parameters. Finally the paper reached the conclusion that the value range of the expected minimum particle number for a leak should be from 4～6.
出处
《洁净与空调技术》
2005年第3期7-11,共5页
Contamination Control & Air-Conditioning Technology
作者简介
姜军，男，1978年7月生，硕士研究生，助理工程师 518031 深圳市福田区上步南路1001号 锦峰大厦77号信箱
