摘要
The concept and structure of serial-connection multi-chamber (SCMC) micropumps with cantilever valves is introduced. The SCMC micropump, which can be manufactured using conventional production techniques and materials, has a multi-layer circular planar structure. The border-upon piezoelectric actuators of a SCMC micropump work in anti-phase, as a result the pumping performance is similar to that of several single-chamber pumps running in series. The theoretical analysis shows that the pumping performance of a SCMC micropump depends not only on the characteristic and geometrical parameters of the piezoelectric actuators, but also on the number of pump chambers. Both flowrate and pressure of a SCMC pump can be enhanced to a certain extent. Four piezoelectric micropumps with different chambers were fabricated and tested. The testing results show that the enhancing extents of the flowrate and pressure of a SCMC piezoelectric micropump are different. The maximum flowrate and pressure of the four-chamber pump achieved are 2.5 times and 3.6 times those of the single-chamber pump achieved.
The concept and structure of serial-connection multi-chamber （SCMC） micropumps with cantilever valves is introduced. The SCMC micropump, which can be manufactured using conventional production techniques and materials, has a multi layer circular planar structure. The bordepupon piezoelectric actuators of a SCMC micropump work in antiphase, as a result the pumping performance is similar to that of several single-chamber pumps running in series. The theoretical analysis shows that the pumping performance of a SCMC micropump depends not only on the characteristic and geometrical parameters of the piezoelectric actuators, but also on the number of pump chambers. Both flowrate and pressure of a SCMC pump can be enhanced to a certain extent. Four piezoelectric micropumps with different chambers were fabricated and tested. The testing results show that the enhancing extents of the flowrate and pressure of a SCMC piezoelectric micropump are different. The maximum flowrate and pressure of the four-chamber pump achieved are 2.5 times and 3.6 times those of the single-chamber pump achieved.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第5期535-541,共7页
Optics and Precision Engineering
基金
National"863"programme(No.2002AA404250,No.2005AA404220)
作者简介
Kan Jun-wu was born in 1965. He received the Bachelor＇s degree in mechanical engineering from the Jilin University of Technology in 1988, and then joined the College of Mechanical Science and Engineering at Jilin University, where he received the Master＇s and Doctor＇s degrees in meehanieM engineering in 2000 and 2003, respectively. He is engaged in the development of the piezoelectric actuators, particularly the piezoelectric micropumps. He is currently an associate professor of Jilin University, and a Post-Doctor re~eareh associate at the Changehun Institute of Optics, Fine Mechanics and Physics of Chinese Academy of Sciences. Email： jutkjw@ yahoo, com. en ; phone： ＋ 86-431-5095358; fax： ＋ 86-431-5095082
