摘要
This paper deals with vacuum UV optical coatings for micro mirror applications. High reflecting low-stress optical coatings have been developed for the next-generation of micro mechanical mirrors. The optimized metal systems are applicable in the VUV spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors.
This paper deals with vacuum UV optical coatings for micro mirror applications. High reflecting low-stress optical coatings have been developed for the next-generation of micro mechanical mirrors. The optimized metal systems are applicable in the VUV spectral region and can be integrated in the technology of MOEMS. such as spatial light modulators （SLM） and micro scanning mirrors.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第4期465-470,共6页
Optics and Precision Engineering
作者简介
Dr. Minghong Yang received his Ph.D. degree from Huazhong University of Science and Technology, Wuhan, China in 2003. Since 2004, he is a visiting scientist at the Fraunhofer Institute of Applied Optics and Precision Engineering. His research interest focuses on optical thin film design,manufacturing and characterization,especially for the Vacuum UV spectral region.
