摘要
用多孔硅作为湿敏元件, 室温下在20Hz^100kHz频率范围,湿度从11%RH升至95%RH进行实验。结果表明:不同测试频率对多孔硅湿敏元件有较大影响,低频范围测量灵敏度高;高频范围效果不佳。讨论了频率影响的机理,其理论分析和实验结果一致。
In the room temperature,the experiment is done at 11%~95% relative humidity under 20Hz^100kHz signal frequency using porous silicon as a humidity sensing material.It is observed that different signal frequency has an effect on the porous silicon sensing element and the sensitivity is good in the lower frequency and the sensitivity is bad in the higher frequency,then the mechanism of frequency affect is analysed.The theory is consistent with the results.
出处
《传感器技术》
CSCD
北大核心
2005年第4期18-20,共3页
Journal of Transducer Technology
基金
河南省高校创新人才基金资助项目(1999-125)
关键词
多孔硅
湿度
频率
PS(porous silicon)
humidity
frequency
